X-ray lithography
Lithographic technique that uses X-rays instead of light / From Wikipedia, the free encyclopedia
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X-ray lithography is a process used in semiconductor device fabrication industry to selectively remove parts of a thin film of photoresist. It uses X-rays to transfer a geometric pattern from a mask to a light-sensitive chemical photoresist, or simply "resist," on the substrate to reach extremely small topological size of a feature. A series of chemical treatments then engraves the produced pattern into the material underneath the photoresist.
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It's less commonly used in commercial production due to prohibitively high costs of materials (such as gold used for X-rays blocking) etc.[1]